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InVestigation of the Magnetic Properties of an RF-Driven Inductively Coupled Argon Plasma
InVestigation of the Magnetic Properties of an RF-Driven Inductively Coupled Argon Plasma
Detailed Information
- Material Type
- 기사
- ISSN
- 03744884
- Author
- O. Vozniy
- Title/Author
- InVestigation of the Magnetic Properties of an RF-Driven Inductively Coupled Argon Plasma / O. Vozniy ; M. Voronko ; B. J. Park ; G. Y. Yeom
- Publish Info
- 서울 : 한국물리학회, 2006.
- Material Info
- pp. 1460-1464
- Added Entry-Personal Name
- M. Voronko
- Added Entry-Personal Name
- B. J. Park
- Added Entry-Personal Name
- G. Y. Yeom
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60144807
MARC
008101012s2006 ulka a eng■022 ▼a03744884
■1001 ▼aO. Vozniy
■24510▼aInVestigation of the Magnetic Properties of an RF-Driven Inductively Coupled Argon Plasma▼dO. Vozniy▼eM. Voronko▼eB. J. Park▼eG. Y. Yeom
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 1460-1464
■7001 ▼aM. Voronko
■7001 ▼aB. J. Park
■7001 ▼aG. Y. Yeom
■773 ▼tJournal of The Korean Physical Society▼gVol. 49 No. 4 (2006. 10)▼d2006, 10
■SIS ▼aS035357▼b60077342▼h8▼s2▼fP
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