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InVestigation of the Magnetic Properties of an RF-Driven Inductively Coupled Argon Plasma
InVestigation of the Magnetic Properties of an RF-Driven Inductively Coupled Argon Plasma
상세정보
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- O. Vozniy
- 서명/저자
- InVestigation of the Magnetic Properties of an RF-Driven Inductively Coupled Argon Plasma / O. Vozniy , M. Voronko , B. J. Park , G. Y. Yeom
- 발행사항
- 서울 : 한국물리학회, 2006.
- 형태사항
- pp. 1460-1464
- 기타저자
- M. Voronko
- 기타저자
- B. J. Park
- 기타저자
- G. Y. Yeom
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60144807
MARC
008101012s2006 ulka a eng■022 ▼a03744884
■1001 ▼aO. Vozniy
■24510▼aInVestigation of the Magnetic Properties of an RF-Driven Inductively Coupled Argon Plasma▼dO. Vozniy▼eM. Voronko▼eB. J. Park▼eG. Y. Yeom
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 1460-1464
■7001 ▼aM. Voronko
■7001 ▼aB. J. Park
■7001 ▼aG. Y. Yeom
■773 ▼tJournal of The Korean Physical Society▼gVol. 49 No. 4 (2006. 10)▼d2006, 10
■SIS ▼aS035357▼b60077342▼h8▼s2▼fP
