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Advanced Microcolumn Operation for Low-Energy Electron-Beam Lithography
Advanced Microcolumn Operation for Low-Energy Electron-Beam Lithography
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Y. C. Kim
- 서명/저자
- Advanced Microcolumn Operation for Low-Energy Electron-Beam Lithography / Y. C. Kim , H. S. Kim , S. J. Ahn , H. W. Kim , T. Yoshimoto , D. W. Kim
- 발행사항
- 서울 : 한국물리학회, 2006.
- 형태사항
- pp. 1428-1433
- 기타저자
- H. S. Kim
- 기타저자
- S. J. Ahn
- 기타저자
- H. W. Kim
- 기타저자
- T. Yoshimoto
- 기타저자
- D. W. Kim
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60144792
MARC
008101011s2006 ulka a eng■022 ▼a03744884
■1001 ▼aY. C. Kim
■24510▼aAdvanced Microcolumn Operation for Low-Energy Electron-Beam Lithography▼dY. C. Kim▼eH. S. Kim▼eS. J. Ahn▼eH. W. Kim▼eT. Yoshimoto▼eD. W. Kim
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 1428-1433
■7001 ▼aH. S. Kim
■7001 ▼aS. J. Ahn
■7001 ▼aH. W. Kim
■7001 ▼aT. Yoshimoto
■7001 ▼aD. W. Kim
■773 ▼tJournal of The Korean Physical Society▼gVol. 49 No. 4 (2006. 10)▼d2006, 10
■SIS ▼aS035357▼b60077342▼h8▼s2▼fP
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