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Structural and Optical Properties of Titanium Oxide Thin Films Deposited on Unheated Substrate at different Total Pressures by Reactive Dc Magnetron Sputtering with a Substrate Bias
Structural and Optical Properties of Titanium Oxide Thin Films Deposited on Unheated Substrate at different Total Pressures by Reactive Dc Magnetron Sputtering with a Substrate Bias
상세정보
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Wei Zhou
- 서명/저자
- Structural and Optical Properties of Titanium Oxide Thin Films Deposited on Unheated Substrate at different Total Pressures by Reactive Dc Magnetron Sputtering with a Substrate Bias / Wei Zhou , Xiaoxia Zhong , Xiaochen Wu , Luqi Yuan , Qiwei Shu , Yuxing Xia
- 발행사항
- 서울 : 한국물리학회, 2006.
- 형태사항
- pp. 2168-2175
- 기타저자
- Xiaoxia Zhong
- 기타저자
- Xiaochen Wu
- 기타저자
- Luqi Yuan
- 기타저자
- Qiwei Shu
- 기타저자
- Yuxing Xia
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60144668
MARC
008101011s2006 ulka a eng■022 ▼a03744884
■1001 ▼aWei Zhou
■24510▼aStructural and Optical Properties of Titanium Oxide Thin Films Deposited on Unheated Substrate at different Total Pressures by Reactive Dc Magnetron Sputtering with a Substrate Bias▼dWei Zhou▼eXiaoxia Zhong▼eXiaochen Wu▼eLuqi Yuan▼eQiwei Shu▼eYuxing Xia
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 2168-2175
■7001 ▼aXiaoxia Zhong
■7001 ▼aXiaochen Wu
■7001 ▼aLuqi Yuan
■7001 ▼aQiwei Shu
■7001 ▼aYuxing Xia
■773 ▼tJournal of The Korean Physical Society▼gVol. 49 No. 5 (2006. 11)Pt. 1▼d2006, 11
■SIS ▼aS036673▼b60077342▼h8▼s2▼fP
