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Further Insights into the Mechanism of Hydrogen-Plasma Surface Passivation of Low-Dielectric Constant Hydrogen Silsesquioxane(HSQ)
Further Insights into the Mechanism of Hydrogen-Plasma Surface Passivation of Low-Dielectric Constant Hydrogen Silsesquioxane(HSQ)
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 서명/저자
- Further Insights into the Mechanism of Hydrogen-Plasma Surface Passivation of Low-Dielectric Constant Hydrogen Silsesquioxane(HSQ) / Sunil Kumar Singh , Alka A. Kumbhar , R. O. Dusane , W. Bock
- 발행사항
- 서울 : 한국물리학회, 2006.
- 형태사항
- pp. 1312-1316
- 기타저자
- Alka A. Kumbhar
- 기타저자
- R. O. Dusane
- 기타저자
- W. Bock
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60144254
MARC
008101007s2006 ulka a eng■022 ▼a03744884
■1001 ▼aSunil Kumar Singh
■24510▼aFurther Insights into the Mechanism of Hydrogen-Plasma Surface Passivation of Low-Dielectric Constant Hydrogen Silsesquioxane(HSQ)▼dSunil Kumar Singh▼eAlka A. Kumbhar▼eR. O. Dusane▼eW. Bock
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 1312-1316
■7001 ▼aAlka A. Kumbhar
■7001 ▼aR. O. Dusane
■7001 ▼aW. Bock
■773 ▼tJournal of The Korean Physical Society▼gVol. 49 No. 3 (2006. 9)▼d2006, 09
■SIS ▼aS034322▼b60077342▼h8▼s2▼fP
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