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Non-Plasma-Based Technologies to Augment Backend Processing in Future ULSI
Non-Plasma-Based Technologies to Augment Backend Processing in Future ULSI
상세정보
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Rajiv O. Dusane
- 서명/저자
- Non-Plasma-Based Technologies to Augment Backend Processing in Future ULSI / Rajiv O. Dusane
- 발행사항
- 서울 : 한국물리학회, 2006.
- 형태사항
- pp. 1281-1286
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60144247
MARC
008101007s2006 ulka a eng■022 ▼a03744884
■1001 ▼aRajiv O. Dusane
■24510▼aNon-Plasma-Based Technologies to Augment Backend Processing in Future ULSI▼dRajiv O. Dusane
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 1281-1286
■773 ▼tJournal of The Korean Physical Society▼gVol. 49 No. 3 (2006. 9)▼d2006, 09
■SIS ▼aS034322▼b60077342▼h8▼s2▼fP
