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Lanthanum-Oxide thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
Lanthanum-Oxide thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Eun-Joo Lee
- 서명/저자
- Lanthanum-Oxide thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition / Eun-Joo Lee , Myoung-Gyun Ko , Beom-Yong Kim , Sang-Kyun Park , Heon-do Kim , Jong-Wan Park
- 발행사항
- 서울 : 한국물리학회, 2006.
- 형태사항
- pp. 1243-1246
- 기타저자
- Myoung-Gyun Ko
- 기타저자
- Beom-Yong Kim
- 기타저자
- Sang-Kyun Park
- 기타저자
- Heon-do Kim
- 기타저자
- Jong-Wan Park
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60144239
MARC
008101007s2006 ulka a eng■022 ▼a03744884
■1001 ▼aEun-Joo Lee
■24510▼aLanthanum-Oxide thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition▼dEun-Joo Lee▼eMyoung-Gyun Ko▼eBeom-Yong Kim▼eSang-Kyun Park▼eHeon-do Kim▼eJong-Wan Park
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 1243-1246
■7001 ▼aMyoung-Gyun Ko
■7001 ▼aBeom-Yong Kim
■7001 ▼aSang-Kyun Park
■7001 ▼aHeon-do Kim
■7001 ▼aJong-Wan Park
■773 ▼tJournal of The Korean Physical Society▼gVol. 49 No. 3 (2006. 9)▼d2006, 09
■SIS ▼aS034322▼b60077342▼h8▼s2▼fP
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