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Characterization of Bulk Metallic Contamination in Epitaxial Wafers
Characterization of Bulk Metallic Contamination in Epitaxial Wafers
Detailed Information
- Material Type
- 기사
- ISSN
- 03744884
- Author
- Sangwook Wee
- Title/Author
- Characterization of Bulk Metallic Contamination in Epitaxial Wafers / Sangwook Wee ; Sungwook Lee ; Byungseop Hong ; Boyoung Lee
- Publish Info
- 서울 : 한국물리학회, 2006.
- Material Info
- pp. 1160-1164
- Added Entry-Personal Name
- Sungwook Lee
- Added Entry-Personal Name
- Byungseop Hong
- Added Entry-Personal Name
- Boyoung Lee
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60144166
MARC
008101006s2006 ulka a eng■022 ▼a03744884
■1001 ▼aSangwook Wee
■24510▼aCharacterization of Bulk Metallic Contamination in Epitaxial Wafers▼dSangwook Wee▼eSungwook Lee▼eByungseop Hong▼eBoyoung Lee
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 1160-1164
■7001 ▼aSungwook Lee
■7001 ▼aByungseop Hong
■7001 ▼aBoyoung Lee
■773 ▼tJournal of The Korean Physical Society▼gVol. 49 No. 3 (2006. 9)▼d2006, 09
■SIS ▼aS034322▼b60077342▼h8▼s2▼fP
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