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Fabrication and Properties of an Epitaxial AIN Film on a SiC Substrate by Using Reactive RF Magnetron Sputtering
Fabrication and Properties of an Epitaxial AIN Film on a SiC Substrate by Using Reactive RF Magnetron Sputtering
상세정보
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Kwang-Ho Kim
- 서명/저자
- Fabrication and Properties of an Epitaxial AIN Film on a SiC Substrate by Using Reactive RF Magnetron Sputtering / Kwang-Ho Kim , Yong-Seong Kim , Sang-Hyun Jeong , Soon-Won Jung , Soo Hong Lee
- 발행사항
- 서울 : 한국물리학회, 2006.
- 형태사항
- pp. 275-278
- 기타저자
- Yong-Seong Kim
- 기타저자
- Sang-Hyun Jeong
- 기타저자
- Soon-Won Jung
- 기타저자
- Soo Hong Lee
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60143884
MARC
008100927s2006 ulka a eng■022 ▼a03744884
■1001 ▼aKwang-Ho Kim
■24510▼aFabrication and Properties of an Epitaxial AIN Film on a SiC Substrate by Using Reactive RF Magnetron Sputtering▼dKwang-Ho Kim▼eYong-Seong Kim▼eSang-Hyun Jeong▼eSoon-Won Jung▼eSoo Hong Lee
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 275-278
■7001 ▼aYong-Seong Kim
■7001 ▼aSang-Hyun Jeong
■7001 ▼aSoon-Won Jung
■7001 ▼aSoo Hong Lee
■773 ▼tJournal of The Korean Physical Society▼gVol. 48 No. 2 (2006. 2)▼d2006, 02
■SIS ▼aS028399▼b60077342▼h8▼s2▼fP
