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Plasma and Electrical Characteristics of a Novel Internal Linear Inductively Coupled Plasma Source for Flat Panel Display Applications
Plasma and Electrical Characteristics of a Novel Internal Linear Inductively Coupled Plasma Source for Flat Panel Display Applications
상세정보
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Kyong Nam Kim
- 서명/저자
- Plasma and Electrical Characteristics of a Novel Internal Linear Inductively Coupled Plasma Source for Flat Panel Display Applications / Kyong Nam Kim , Geun Young Yeom
- 발행사항
- 서울 : 한국물리학회, 2006.
- 형태사항
- pp. 422-426
- 기타저자
- Geun Young Yeom
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60143833
MARC
008100924s2006 ulka a eng■022 ▼a03744884
■1001 ▼aKyong Nam Kim
■24510▼aPlasma and Electrical Characteristics of a Novel Internal Linear Inductively Coupled Plasma Source for Flat Panel Display Applications▼dKyong Nam Kim▼eGeun Young Yeom
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 422-426
■7001 ▼aGeun Young Yeom
■773 ▼tJournal of The Korean Physical Society▼gVol. 48 No. 3 (2006. 3)▼d2006, 03
■SIS ▼aS028400▼b60077342▼h8▼s2▼fP
