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Atomic Layer Deposition of Ultrathin Metal-Oxide Films for Nano-Scale Device Applications
Atomic Layer Deposition of Ultrathin Metal-Oxide Films for Nano-Scale Device Applications
상세정보
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Hyoungsub Kim
- 서명/저자
- Atomic Layer Deposition of Ultrathin Metal-Oxide Films for Nano-Scale Device Applications / Hyoungsub Kim , Paul C. McIntyre
- 발행사항
- 서울 : 한국물리학회, 2006.
- 형태사항
- pp. 5-17
- 기타저자
- Paul C. McIntyre
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60143421
MARC
008100914s2006 ulka a eng■022 ▼a03744884
■1001 ▼aHyoungsub Kim
■24510▼aAtomic Layer Deposition of Ultrathin Metal-Oxide Films for Nano-Scale Device Applications▼dHyoungsub Kim▼ePaul C. McIntyre
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 5-17
■7001 ▼aPaul C. McIntyre
■773 ▼tJournal of The Korean Physical Society▼gVol. 48 No. 1 (2006. 1)▼d2006, 01
■SIS ▼aS028398▼b60077342▼h8▼s2▼fP
