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Experimental Study of Nanoparticle Generation During High-Density Plasma Chemical Vapor Deposition of Poly-Silicon Films
Experimental Study of Nanoparticle Generation During High-Density Plasma Chemical Vapor Deposition of Poly-Silicon Films
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Taesung Kim
- 서명/저자
- Experimental Study of Nanoparticle Generation During High-Density Plasma Chemical Vapor Deposition of Poly-Silicon Films / Taesung Kim , Jae-Boong Choi , Youngjin Kim
- 발행사항
- 서울 : 한국물리학회, 2007.
- 형태사항
- pp. 1187-1190
- 기타저자
- Jae-Boong Choi
- 기타저자
- Youngjin kim
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60141835
MARC
008100820s2007 ulka a eng■022 ▼a03744884
■1001 ▼aTaesung Kim
■24510▼aExperimental Study of Nanoparticle Generation During High-Density Plasma Chemical Vapor Deposition of Poly-Silicon Films▼dTaesung Kim▼eJae-Boong Choi▼eYoungjin Kim
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. 1187-1190
■7001 ▼aJae-Boong Choi
■7001 ▼aYoungjin kim
■773 ▼tJournal of The Korean Physical Society▼gVol. 51 No. 3 (2007. 9)▼d2007, 09
■SIS ▼aS043255▼b60077342▼h8▼s2▼fP
