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The Structural and Mechanical Properties of Ti Films Fabricated by Using RF Magnetron Sputtering
The Structural and Mechanical Properties of Ti Films Fabricated by Using RF Magnetron Sputtering
상세정보
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Y.-H.Song
- 서명/저자
- The Structural and Mechanical Properties of Ti Films Fabricated by Using RF Magnetron Sputtering / Y.-H.Song , S.-J.Cho , C.-K.Jung , I.-S.Bae , J.-H.Boo , S.Kim
- 발행사항
- 서울 : 한국물리학회, 2007.
- 형태사항
- pp. 1152-1155
- 기타저자
- S.-J.Cho
- 기타저자
- C.-K.Jung
- 기타저자
- I.-S.Bae
- 기타저자
- J.-H.Boo
- 기타저자
- S.Kim
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60141800
MARC
008100820s2007 ulka a eng■022 ▼a03744884
■1001 ▼aY.-H.Song
■24510▼aThe Structural and Mechanical Properties of Ti Films Fabricated by Using RF Magnetron Sputtering▼dY.-H.Song▼eS.-J.Cho▼eC.-K.Jung▼eI.-S.Bae▼eJ.-H.Boo▼eS.Kim
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. 1152-1155
■7001 ▼aS.-J.Cho
■7001 ▼aC.-K.Jung
■7001 ▼aI.-S.Bae
■7001 ▼aJ.-H.Boo
■7001 ▼aS.Kim
■773 ▼tJournal of The Korean Physical Society▼gVol. 51 No. 3 (2007. 9)▼d2007, 09
■SIS ▼aS043255▼b60077342▼h8▼s2▼fP
