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Study of the Tribological Properties of DLC Double-Layer Films Grown by Using Plasma enhanced Chemical-Vapor Deposition and Closed-Field Unbalanced Magnetron Sputtering
Study of the Tribological Properties of DLC Double-Layer Films Grown by Using Plasma enhanced Chemical-Vapor Deposition and Closed-Field Unbalanced Magnetron Sputtering
Detailed Information
- Material Type
- 기사
- ISSN
- 03744884
- Author
- Yun Hye Cho
- Title/Author
- Study of the Tribological Properties of DLC Double-Layer Films Grown by Using Plasma enhanced Chemical-Vapor Deposition and Closed-Field Unbalanced Magnetron Sputtering / Yun Hye Cho ; Won Seok Choi ; Yong Seob Park ; Hyung Jun Cho ; Byungyou Hong
- Publish Info
- 서울 : 한국물리학회, 2007.
- Material Info
- pp. 1129-1133
- Added Entry-Personal Name
- Won Seok Choi
- Added Entry-Personal Name
- Yong Seob Park
- Added Entry-Personal Name
- Hyung Jun Cho
- Added Entry-Personal Name
- Byungyou Hong
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60141779
MARC
008100820s2007 ulka a eng■022 ▼a03744884
■1001 ▼aYun Hye Cho
■24510▼aStudy of the Tribological Properties of DLC Double-Layer Films Grown by Using Plasma enhanced Chemical-Vapor Deposition and Closed-Field Unbalanced Magnetron Sputtering▼dYun Hye Cho▼eWon Seok Choi▼eYong Seob Park▼eHyung Jun Cho▼eByungyou Hong
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. 1129-1133
■7001 ▼aWon Seok Choi
■7001 ▼aYong Seob Park
■7001 ▼aHyung Jun Cho
■7001 ▼aByungyou Hong
■773 ▼tJournal of The Korean Physical Society▼gVol. 51 No. 3 (2007. 9)▼d2007, 09
■SIS ▼aS043255▼b60077342▼h8▼s2▼fP
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