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Study of the Tribological Properties of DLC Double-Layer Films Grown by Using Plasma enhanced Chemical-Vapor Deposition and Closed-Field Unbalanced Magnetron Sputtering
Study of the Tribological Properties of DLC Double-Layer Films Grown by Using Plasma enhanced Chemical-Vapor Deposition and Closed-Field Unbalanced Magnetron Sputtering
상세정보
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Yun Hye Cho
- 서명/저자
- Study of the Tribological Properties of DLC Double-Layer Films Grown by Using Plasma enhanced Chemical-Vapor Deposition and Closed-Field Unbalanced Magnetron Sputtering / Yun Hye Cho , Won Seok Choi , Yong Seob Park , Hyung Jun Cho , Byungyou Hong
- 발행사항
- 서울 : 한국물리학회, 2007.
- 형태사항
- pp. 1129-1133
- 기타저자
- Won Seok Choi
- 기타저자
- Yong Seob Park
- 기타저자
- Hyung Jun Cho
- 기타저자
- Byungyou Hong
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60141779
MARC
008100820s2007 ulka a eng■022 ▼a03744884
■1001 ▼aYun Hye Cho
■24510▼aStudy of the Tribological Properties of DLC Double-Layer Films Grown by Using Plasma enhanced Chemical-Vapor Deposition and Closed-Field Unbalanced Magnetron Sputtering▼dYun Hye Cho▼eWon Seok Choi▼eYong Seob Park▼eHyung Jun Cho▼eByungyou Hong
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. 1129-1133
■7001 ▼aWon Seok Choi
■7001 ▼aYong Seob Park
■7001 ▼aHyung Jun Cho
■7001 ▼aByungyou Hong
■773 ▼tJournal of The Korean Physical Society▼gVol. 51 No. 3 (2007. 9)▼d2007, 09
■SIS ▼aS043255▼b60077342▼h8▼s2▼fP
