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Characteristics of Thermal-Flow Fields in a PECVD Reactor with Various Operating Conditions
Characteristics of Thermal-Flow Fields in a PECVD Reactor with Various Operating Conditions
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Jae-Sang Baek
- 서명/저자
- Characteristics of Thermal-Flow Fields in a PECVD Reactor with Various Operating Conditions / Jae-Sang Baek , Youn-Jea Kim , Jong-Chul Lee , Jin-Hyo Boo
- 발행사항
- 서울 : 한국물리학회, 2007.
- 형태사항
- pp. 1113-1118
- 기타저자
- Youn-Jea Kim
- 기타저자
- Jong-Chul Lee
- 기타저자
- Jin-Hyo Boo
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60141764
MARC
008100820s2007 ulka a eng■022 ▼a03744884
■1001 ▼aJae-Sang Baek
■24510▼aCharacteristics of Thermal-Flow Fields in a PECVD Reactor with Various Operating Conditions ▼dJae-Sang Baek▼eYoun-Jea Kim▼eJong-Chul Lee▼eJin-Hyo Boo
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. 1113-1118
■7001 ▼aYoun-Jea Kim
■7001 ▼aJong-Chul Lee
■7001 ▼aJin-Hyo Boo
■773 ▼tJournal of The Korean Physical Society▼gVol. 51 No. 3 (2007. 9)▼d2007, 09
■SIS ▼aS043255▼b60077342▼h8▼s2▼fP
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