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The Effect of the RF-Sputtering Condition on the ZrO2 Thin Film's Characteristics
The Effect of the RF-Sputtering Condition on the ZrO2 Thin Film's Characteristics
상세정보
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Honglae Sohn
- 서명/저자
- The Effect of the RF-Sputtering Condition on the ZrO2 Thin Films Characteristics / Honglae Sohn , Bong-Ju Lee , Young-Tae Cho
- 발행사항
- 서울 : 한국물리학회, 2007.
- 형태사항
- pp. 1038-1041
- 기타저자
- Bong-Ju Lee
- 기타저자
- Young-Tae Cho
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60141623
MARC
008100819s2007 ulka a eng■022 ▼a03744884
■1001 ▼aHonglae Sohn
■24510▼aThe Effect of the RF-Sputtering Condition on the ZrO2 Thin Film's Characteristics▼dHonglae Sohn▼eBong-Ju Lee▼eYoung-Tae Cho
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. 1038-1041
■7001 ▼aBong-Ju Lee
■7001 ▼aYoung-Tae Cho
■773 ▼tJournal of The Korean Physical Society▼gVol. 51 No. 3 (2007. 9)▼d2007, 09
■SIS ▼aS043255▼b60077342▼h8▼s2▼fP
