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Deep Reactive Ion Etching of Polyimide for Microfluidic Applications
Deep Reactive Ion Etching of Polyimide for Microfluidic Applications
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- T.N.T.Nguyen
- 서명/저자
- Deep Reactive Ion Etching of Polyimide for Microfluidic Applications / T.N.T.Nguyen , N.-E.Lee
- 발행사항
- 서울 : 한국물리학회, 2007.
- 형태사항
- pp. 984-988
- 기타저자
- N.-E.Lee
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60141577
MARC
008100819s2007 ulka a eng■022 ▼a03744884
■1001 ▼aT.N.T.Nguyen
■24510▼aDeep Reactive Ion Etching of Polyimide for Microfluidic Applications▼dT.N.T.Nguyen▼eN.-E.Lee
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. 984-988
■7001 ▼aN.-E.Lee
■773 ▼tJournal of The Korean Physical Society▼gVol. 51 No. 3 (2007. 9)▼d2007, 09
■SIS ▼aS043255▼b60077342▼h8▼s2▼fP
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