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Reduction of the Base Pressure of an UHV System by Using Turbomolecular Pumps
Reduction of the Base Pressure of an UHV System by Using Turbomolecular Pumps
상세정보
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- C.D.Park
- 서명/저자
- Reduction of the Base Pressure of an UHV System by Using Turbomolecular Pumps / C.D.Park , S.M. Chung , D.J.Seong , Y.H.Shin , K.H.Chung
- 발행사항
- 서울 : 한국물리학회, 2007.
- 형태사항
- pp. 912-915
- 기타저자
- S.M. Chung
- 기타저자
- D.J.Seong
- 기타저자
- Y.H.Shin
- 기타저자
- K.H.Chung
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60141561
MARC
008100819s2007 ulka a eng■022 ▼a03744884
■1001 ▼aC.D.Park
■24510▼aReduction of the Base Pressure of an UHV System by Using Turbomolecular Pumps▼dC.D.Park▼eS.M. Chung▼eD.J.Seong▼eY.H.Shin▼eK.H.Chung
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. 912-915
■7001 ▼aS.M. Chung
■7001 ▼aD.J.Seong
■7001 ▼aY.H.Shin
■7001 ▼aK.H.Chung
■773 ▼tJournal of The Korean Physical Society▼gVol. 51 No. 3 (2007. 9)▼d2007, 09
■SIS ▼aS043255▼b60077342▼h8▼s2▼fP
