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Spectroscopic Ellipsometric Analysis of a Patterned Cr Film on Quartz
Spectroscopic Ellipsometric Analysis of a Patterned Cr Film on Quartz
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- S. Y. Lee
- 서명/저자
- Spectroscopic Ellipsometric Analysis of a Patterned Cr Film on Quartz / S. Y. Lee , T. H. Ghong , J. -M. Chung , Y. D. Kim , D. S. Kim , C. H. Kim
- 발행사항
- 서울 : 한국물리학회, 2007.
- 형태사항
- pp. 189-192
- 기타저자
- T. H. Ghong
- 기타저자
- J. -M. Chung
- 기타저자
- Y. D. Kim
- 기타저자
- D. S. Kim
- 기타저자
- C. H. Kim
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60141284
MARC
008100816s2007 ulka a eng■022 ▼a03744884
■1001 ▼aS. Y. Lee
■24510▼aSpectroscopic Ellipsometric Analysis of a Patterned Cr Film on Quartz▼dS. Y. Lee▼eT. H. Ghong▼eJ. -M. Chung▼eY. D. Kim▼eD. S. Kim▼eC. H. Kim
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. 189-192
■7001 ▼aT. H. Ghong
■7001 ▼aJ. -M. Chung
■7001 ▼aY. D. Kim
■7001 ▼aD. S. Kim
■7001 ▼aC. H. Kim
■773 ▼tJournal of The Korean Physical Society▼gVol. 51 No. 1 Pt.1 (2007. 7)▼d2007, 07
■SIS ▼aS041108▼b60077342▼h8▼s2▼fP
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