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Effects of Annealing Temperature on the Electrical Properties of ALD-Grown Hf-Silicate Films Having Various Si Contents
Effects of Annealing Temperature on the Electrical Properties of ALD-Grown Hf-Silicate Films Having Various Si Contents
상세정보
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Dongwon Lee
- 서명/저자
- Effects of Annealing Temperature on the Electrical Properties of ALD-Grown Hf-Silicate Films Having Various Si Contents / Dongwon Lee , Dongchan Suh , Dae-Hong Ko , Kyung Park , Myung Soo Lee , Hyoungsub Kim
- 발행사항
- 서울 : 한국물리학회, 2007.
- 형태사항
- pp. 168-173
- 기타저자
- Dongchan Suh
- 기타저자
- Dae-Hong Ko
- 기타저자
- Kyung Park
- 기타저자
- Myung Soo Lee
- 기타저자
- Hyoungsub Kim
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60141272
MARC
008100816s2007 ulka a eng■022 ▼a03744884
■1001 ▼aDongwon Lee
■24510▼aEffects of Annealing Temperature on the Electrical Properties of ALD-Grown Hf-Silicate Films Having Various Si Contents▼dDongwon Lee▼eDongchan Suh▼eDae-Hong Ko▼eKyung Park▼eMyung Soo Lee▼eHyoungsub Kim
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. 168-173
■7001 ▼aDongchan Suh
■7001 ▼aDae-Hong Ko
■7001 ▼aKyung Park
■7001 ▼aMyung Soo Lee
■7001 ▼aHyoungsub Kim
■773 ▼tJournal of The Korean Physical Society▼gVol. 51 No. 1 Pt.1 (2007. 7)▼d2007, 07
■SIS ▼aS041108▼b60077342▼h8▼s2▼fP
