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Calculation of Reactor Chamber Resistance of Inductively Coupled Plasma Source
Calculation of Reactor Chamber Resistance of Inductively Coupled Plasma Source
Detailed Information
- Material Type
- 기사
- ISSN
- 03744884
- Author
- Deuk-Chul Kwon
- Title/Author
- Calculation of Reactor Chamber Resistance of Inductively Coupled Plasma Source / Deuk-Chul Kwon ; Nam-Sik Yoon
- Publish Info
- 서울 : 한국물리학회, 2007.
- Material Info
- pp. 522-527
- Added Entry-Personal Name
- Nam-Sik Yoon
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60141206
MARC
008100816s2007 ulka a eng■022 ▼a03744884
■1001 ▼aDeuk-Chul Kwon
■24510▼aCalculation of Reactor Chamber Resistance of Inductively Coupled Plasma Source▼dDeuk-Chul Kwon▼eNam-Sik Yoon
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. 522-527
■7001 ▼aNam-Sik Yoon
■773 ▼tJournal of The Korean Physical Society▼gVol. 51 No. 2 (2007. 8)▼d2007, 08
■SIS ▼aS041152▼b60077342▼h8▼s2▼fP
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