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Effects of Current Wave Forms and Current Densities on the Electroplated Cu Interconnection in Damascene Plating
Effects of Current Wave Forms and Current Densities on the Electroplated Cu Interconnection in Damascene Plating
Detailed Information
- 자료유형
- 기사
- ISSN
- 15986462
- 저자명
- Yu Yong Lee
- 서명/저자
- Effects of Current Wave Forms and Current Densities on the Electroplated Cu Interconnection in Damascene Plating / Yu Yong Lee , Young Joon Park , B. W. Cho , Jae-Bong Lee
- 발행사항
- 서울 : 한국부식학회(현)한국부식방식학회, 2002.
- 형태사항
- pp. 90
- 기타저자
- Young Joon Park
- 기타저자
- B. W. Cho
- 기타저자
- Jae-Bong Lee
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60140767
MARC
008100804s2002 ulka a eng■022 ▼a15986462
■1001 ▼aYu Yong Lee
■24510▼aEffects of Current Wave Forms and Current Densities on the Electroplated Cu Interconnection in Damascene Plating▼dYu Yong Lee▼eYoung Joon Park▼eB. W. Cho▼eJae-Bong Lee
■260 ▼a서울▼b한국부식학회(현)한국부식방식학회▼c2002.
■300 ▼app. 90
■7001 ▼aYoung Joon Park
■7001 ▼aB. W. Cho
■7001 ▼aJae-Bong Lee
■773 ▼tCorrosion Science and Technology▼gVOL.31 NO.1 (2002 February)▼d2002, 02
■SIS ▼aS013323▼b60053754▼h8▼s2▼fP
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