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Systematic Investigation of Metal Gates on Atomic-Layer-Deposited HfO₂
Systematic Investigation of Metal Gates on Atomic-Layer-Deposited HfO₂ / Hyundoek Yang an...
Systematic Investigation of Metal Gates on Atomic-Layer-Deposited HfO₂

Detailed Information

자료유형  
 기사
ISSN  
17388090
저자명  
Hyundoek Yang and Hyunsang Hwang
서명/저자  
Systematic Investigation of Metal Gates on Atomic-Layer-Deposited HfO₂ / Hyundoek Yang and Hyunsang Hwang
발행사항  
서울 : 대한금속재료학회, 2005.
형태사항  
pp. 31-40
기본자료저록  
ELECTRONIC MATERIALS Letters : Vol. 1 No. 1 2005, 11
모체레코드  
모체정보확인
Control Number  
kjul:60132181

MARC

 008100607s2005        ulka    a                          eng
■022    ▼a17388090
■1001  ▼aHyundoek  Yang  and  Hyunsang  Hwang
■24510▼aSystematic  Investigation  of  Metal  Gates  on  Atomic-Layer-Deposited  HfO₂▼dHyundoek  Yang  and  Hyunsang  Hwang
■260    ▼a서울▼b대한금속재료학회▼c2005.
■300    ▼app.  31-40
■773    ▼tELECTRONIC  MATERIALS  Letters▼gVol.  1  No.  1▼d2005,  11
■SIS    ▼aS027262▼b60077032▼h8▼s2▼fP

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