서브메뉴
검색
Measurement and Visualization of Doping Profile in Silicon Using Kelvin Probe Force Microscopy (KPFM)
Measurement and Visualization of Doping Profile in Silicon Using Kelvin Probe Force Microscopy (KPFM)
상세정보
- 자료유형
- 기사
- ISSN
- 17388090
- 저자명
- Hyungjung Shin
- 서명/저자
- Measurement and Visualization of Doping Profile in Silicon Using Kelvin Probe Force Microscopy (KPFM) / Hyungjung Shin , Bongki Lee , hanhyung Kim , ongsik Park , ong-Ki Min , uwhan Jung , eungbum Hong , nd Sungdong Kim
- 발행사항
- 서울 : 대한금속재료학회, 2005.
- 형태사항
- pp. 127-134
- 기타저자
- Bongki Lee
- 기타저자
- hanhyung Kim
- 기타저자
- ongsik Park
- 기타저자
- ong-Ki Min
- 기타저자
- uwhan Jung
- 기타저자
- eungbum Hong
- 기타저자
- nd Sungdong Kim
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60132169
MARC
008100607s2005 ulka a eng■022 ▼a17388090
■1001 ▼aHyungjung Shin
■24510▼aMeasurement and Visualization of Doping Profile in Silicon Using Kelvin Probe Force Microscopy (KPFM)▼dHyungjung Shin▼eBongki Lee▼ehanhyung Kim▼eongsik Park▼eong-Ki Min▼euwhan Jung▼eeungbum Hong▼end Sungdong Kim
■260 ▼a서울▼b대한금속재료학회▼c2005.
■300 ▼app. 127-134
■7001 ▼aBongki Lee
■7001 ▼ahanhyung Kim
■7001 ▼aongsik Park
■7001 ▼aong-Ki Min
■7001 ▼auwhan Jung
■7001 ▼aeungbum Hong
■7001 ▼and Sungdong Kim
■773 ▼tELECTRONIC MATERIALS Letters▼gVol. 1 No. 2▼d2005, 12
■SIS ▼aS028678▼b60077032▼h8▼s2▼fP
