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Measurement and Visualization of Doping Profile in Silicon Using Kelvin Probe Force Microscopy (KPFM)
Measurement and Visualization of Doping Profile in Silicon Using Kelvin Probe Force Microscopy (KPFM)
Detailed Information
- 자료유형
- 기사
- ISSN
- 17388090
- 저자명
- Hyungjung Shin
- 서명/저자
- Measurement and Visualization of Doping Profile in Silicon Using Kelvin Probe Force Microscopy (KPFM) / Hyungjung Shin , Bongki Lee , hanhyung Kim , ongsik Park , ong-Ki Min , uwhan Jung , eungbum Hong , nd Sungdong Kim
- 발행사항
- 서울 : 대한금속재료학회, 2005.
- 형태사항
- pp. 127-134
- 기타저자
- Bongki Lee
- 기타저자
- hanhyung Kim
- 기타저자
- ongsik Park
- 기타저자
- ong-Ki Min
- 기타저자
- uwhan Jung
- 기타저자
- eungbum Hong
- 기타저자
- nd Sungdong Kim
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60132169
MARC
008100607s2005 ulka a eng■022 ▼a17388090
■1001 ▼aHyungjung Shin
■24510▼aMeasurement and Visualization of Doping Profile in Silicon Using Kelvin Probe Force Microscopy (KPFM)▼dHyungjung Shin▼eBongki Lee▼ehanhyung Kim▼eongsik Park▼eong-Ki Min▼euwhan Jung▼eeungbum Hong▼end Sungdong Kim
■260 ▼a서울▼b대한금속재료학회▼c2005.
■300 ▼app. 127-134
■7001 ▼aBongki Lee
■7001 ▼ahanhyung Kim
■7001 ▼aongsik Park
■7001 ▼aong-Ki Min
■7001 ▼auwhan Jung
■7001 ▼aeungbum Hong
■7001 ▼and Sungdong Kim
■773 ▼tELECTRONIC MATERIALS Letters▼gVol. 1 No. 2▼d2005, 12
■SIS ▼aS028678▼b60077032▼h8▼s2▼fP
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