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Fault Detection, Diagnosis, and Optimization of Wafer Manufacturing Processes utilizing Knowledge Creation
Fault Detection, Diagnosis, and Optimization of Wafer Manufacturing Processes utilizing Knowledge Creation
Detailed Information
- 자료유형
- 기사
- ISSN
- 15986446
- 서명/저자
- Fault Detection, Diagnosis, and Optimization of Wafer Manufacturing Processes utilizing Knowledge Creation / Hyeon Bae , Sungshin Kim , Kwang-Bang Woo
- 발행사항
- 서울 : 제어자동화시스템공학회, 2006.
- 형태사항
- pp. 372-381
- 키워드
- FAULT DETECTION DIAGNOSIS OPTIMIZATION WAFER MANUFACTURING PROCESSES UTILIZING KNOWLEDGE CREATION
- 기타저자
- Hyeon Bae
- 기타저자
- Sungshin Kim
- 기타저자
- Kwang-Bang Woo
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60107839
MARC
008071017s2006 ULKa a ENG■022 ▼a15986446
■245 ▼aFault Detection, Diagnosis, and Optimization of Wafer Manufacturing Processes utilizing Knowledge Creation▼dHyeon Bae▼eSungshin Kim▼eKwang-Bang Woo
■260 ▼a서울▼b제어자동화시스템공학회▼c2006.
■300 ▼app. 372-381
■653 ▼aFAULT▼aDETECTION▼aDIAGNOSIS▼aOPTIMIZATION▼aWAFER▼aMANUFACTURING▼aPROCESSES▼aUTILIZING▼aKNOWLEDGE▼aCREATION
■7001 ▼aHyeon Bae
■7001 ▼aSungshin Kim
■7001 ▼aKwang-Bang Woo
■773 ▼tInternational Journal of Control, Automation, and System▼gVol. 4 No. 3 (2006 June)▼d2006, 06
■SIS ▼aS027168▼b60067606▼h8▼s2
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