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Materials science in microelectronics
Materials science in microelectronics
Detailed Information
- 자료유형
- 단행본
- ISBN
- 187885707X
- 청구기호
- 569 M149m
- 저자명
- Machlin, E. S.
- 서명/저자
- Materials science in microelectronics / E. S. Machlin.
- 발행사항
- Croton-on-Hudson, N.Y. : Giro Press, 1995.
- 형태사항
- xi, 228 p. : ill ; 24 cm.
- 주기사항
- the relationships between thin film processing and structure
- 서지주기
- Includes bibliographical references and index.
- 일반주제명
- Thin films
- 일반주제명
- Microelectronics
- 가격
- 18000
- Control Number
- kjul:60103384
MARC
008051122s1995 nyua b 001 0 eng d■020 ▼a187885707X
■090 ▼a569▼bM149m
■1001 ▼aMachlin, E. S.
■24510▼aMaterials science in microelectronics▼dE. S. Machlin.
■260 ▼aCroton-on-Hudson, N.Y.▼bGiro Press▼c1995.
■300 ▼axi, 228 p.▼bill▼c24 cm.
■50000▼athe relationships between thin film processing and structure
■504 ▼aIncludes bibliographical references and index.
■650 0▼aThin films
■650 0▼aMicroelectronics
■9500 ▼b18000
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