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Development of Heavy Negative - Ion Sources and Their Application to Ion Impantation and Ion Beam Deposition
Development of Heavy Negative - Ion Sources and Their Application to Ion Impantation and Ion Beam Deposition
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Junzo Ishikawa
- 서명/저자
- Development of Heavy Negative - Ion Sources and Their Application to Ion Impantation and Ion Beam Deposition / Junzo Ishikawa
- 발행사항
- 서울 : 한국물리학회, 2006.
- 형태사항
- pp. 703-710
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60098173
MARC
008070503s2006 ULKa a ENG■022 ▼a03744884
■1001 ▼aJunzo Ishikawa
■245 ▼aDevelopment of Heavy Negative - Ion Sources and Their Application to Ion Impantation and Ion Beam Deposition▼dJunzo Ishikawa
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 703-710
■653 ▼aDEVELOPMENT▼aHEAVY▼aNEGATIVE▼aION▼aSOURCES▼aAPPLICATION▼aIMPANTATION▼aBEAM▼aDEPOSITION
■773 ▼tJournal of The Korean Physical Society▼gVol. 48 No. 4 (2006. 4)Pt.1▼d2006, 04
■SIS ▼aS037892▼b60077342▼h8▼s2
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