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Development of Heavy Negative - Ion Sources and Their Application to Ion Impantation and Ion Beam Deposition
Development of Heavy Negative - Ion Sources and Their Application to Ion Impantation and I...
Development of Heavy Negative - Ion Sources and Their Application to Ion Impantation and Ion Beam Deposition

Detailed Information

자료유형  
 기사
ISSN  
03744884
저자명  
Junzo Ishikawa
서명/저자  
Development of Heavy Negative - Ion Sources and Their Application to Ion Impantation and Ion Beam Deposition / Junzo Ishikawa
발행사항  
서울 : 한국물리학회, 2006.
형태사항  
pp. 703-710
키워드  
DEVELOPMENT HEAVY NEGATIVE ION SOURCES APPLICATION IMPANTATION BEAM DEPOSITION
기본자료저록  
Journal of The Korean Physical Society : Vol. 48 No. 4 (2006. 4)Pt.1 2006, 04
모체레코드  
모체정보확인
Control Number  
kjul:60098173

MARC

 008070503s2006        ULKa    a                          ENG
■022    ▼a03744884
■1001  ▼aJunzo  Ishikawa
■245    ▼aDevelopment  of  Heavy  Negative  -  Ion  Sources  and  Their  Application  to  Ion  Impantation  and  Ion  Beam  Deposition▼dJunzo  Ishikawa
■260    ▼a서울▼b한국물리학회▼c2006.
■300    ▼app.  703-710
■653    ▼aDEVELOPMENT▼aHEAVY▼aNEGATIVE▼aION▼aSOURCES▼aAPPLICATION▼aIMPANTATION▼aBEAM▼aDEPOSITION
■773    ▼tJournal  of  The  Korean  Physical  Society▼gVol.  48  No.  4  (2006.  4)Pt.1▼d2006,  04
■SIS    ▼aS037892▼b60077342▼h8▼s2

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