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Modeling for Resist reflow of an Elongated Contact Hole
Modeling for Resist reflow of an Elongated Contact Hole
상세정보
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Ji-eun Lee.
- 서명/저자
- Modeling for Resist reflow of an Elongated Contact Hole / Ji-eun Lee. , Kang Baek Kim , Mi-rim Jung , Hye-young Kang , Jong-sun Kim , Joo-yoo Hong , Hye-keun Oh , Dai-gyoung Kim , Jun-tack Park.
- 발행사항
- 서울 : 한국물리학회, 2006.
- 형태사항
- pp. 646-650
- 기타저자
- Kang Baek Kim
- 기타저자
- Mi-rim Jung
- 기타저자
- Hye-young Kang
- 기타저자
- Jong-sun Kim
- 기타저자
- Joo-yoo Hong
- 기타저자
- Hye-keun Oh
- 기타저자
- Dai-gyoung Kim
- 기타저자
- Jun-tack Park.
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60097784
MARC
008070418s2006 ULKa a ENG■022 ▼a03744884
■1001 ▼aJi-eun Lee.
■245 ▼aModeling for Resist reflow of an Elongated Contact Hole ▼dJi-eun Lee. ▼eKang Baek Kim▼eMi-rim Jung▼eHye-young Kang▼eJong-sun Kim▼eJoo-yoo Hong▼eHye-keun Oh▼eDai-gyoung Kim▼eJun-tack Park.
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 646-650
■653 ▼aMODELING▼aRESIST▼aREFLOW▼aELONGATED▼aCONTACT▼aHOLE
■7001 ▼aKang Baek Kim
■7001 ▼aMi-rim Jung
■7001 ▼aHye-young Kang
■7001 ▼aJong-sun Kim
■7001 ▼aJoo-yoo Hong
■7001 ▼aHye-keun Oh
■7001 ▼aDai-gyoung Kim
■7001 ▼aJun-tack Park.
■773 ▼tJournal of The Korean Physical Society▼gVol. 49 No. 2 (2006. 8)▼d2006, 08
■URL ▼ahttp://www.kps.or.kr
■SIS ▼aS028785▼b60077342▼h8▼s2
