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Optimum Operating Frequency of an Atmospheric-Pressure Dielectric-Barrier Discharge for the Photo-Resistor Ashing Process
Optimum Operating Frequency of an Atmospheric-Pressure Dielectric-Barrier Discharge for the Photo-Resistor Ashing Process
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Gon-ho Kim.
- 서명/저자
- Optimum Operating Frequency of an Atmospheric-Pressure Dielectric-Barrier Discharge for the Photo-Resistor Ashing Process / Gon-ho Kim. , Sang-heon Song.
- 발행사항
- 서울 : 한국물리학회, 2006.
- 형태사항
- pp. 558-562
- 키워드
- OPTIMUM OPERATING FREQUENCY ATMOSPHERICPRESSURE DIELECTRICBARRIER DISCHARGE PHOTORESISTOR ASHING PROCESS
- 기타저자
- Sang-heon Song.
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60097767
MARC
008070418s2006 ULKa a ENG■022 ▼a03744884
■1001 ▼aGon-ho Kim.
■245 ▼aOptimum Operating Frequency of an Atmospheric-Pressure Dielectric-Barrier Discharge for the Photo-Resistor Ashing Process ▼dGon-ho Kim. ▼eSang-heon Song.
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 558-562
■653 ▼aOPTIMUM▼aOPERATING▼aFREQUENCY▼aATMOSPHERICPRESSURE▼aDIELECTRICBARRIER▼aDISCHARGE▼aPHOTORESISTOR▼aASHING▼aPROCESS
■7001 ▼aSang-heon Song.
■773 ▼tJournal of The Korean Physical Society▼gVol. 49 No. 2 (2006. 8)▼d2006, 08
■URL ▼ahttp://www.kps.or.kr
■SIS ▼aS028785▼b60077342▼h8▼s2
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