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The Influence of Transmission Reduction by Mask Haze Formation in ArF Lithography
The Influence of Transmission Reduction by Mask Haze Formation in ArF Lithography
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Sung-jin Kim.
- 서명/저자
- The Influence of Transmission Reduction by Mask Haze Formation in ArF Lithography / Sung-jin Kim. , Jung-hyuk Cho , Jin-back Park , Sung-hyuck Kim , Jai-sun Kyoung , Seung-wook Park , Ilsin An , Hye-keun Oh.
- 발행사항
- 서울 : 한국물리학회, 2006.
- 형태사항
- pp. 518-523
- 기타저자
- Jung-hyuk Cho
- 기타저자
- Jin-back Park
- 기타저자
- Sung-hyuck Kim
- 기타저자
- Jai-sun Kyoung
- 기타저자
- Seung-wook Park
- 기타저자
- Ilsin An
- 기타저자
- Hye-keun Oh.
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60097757
MARC
008070418s2006 ULKa a ENG■022 ▼a03744884
■1001 ▼aSung-jin Kim.
■245 ▼aThe Influence of Transmission Reduction by Mask Haze Formation in ArF Lithography ▼dSung-jin Kim. ▼eJung-hyuk Cho▼eJin-back Park▼eSung-hyuck Kim▼eJai-sun Kyoung▼eSeung-wook Park▼eIlsin An▼eHye-keun Oh.
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 518-523
■653 ▼aINFLUENCE▼aTRANSMISSION▼aREDUCTION▼aMASK▼aHAZE▼aFORMATION▼aARF▼aLITHOGRAPHY
■7001 ▼aJung-hyuk Cho
■7001 ▼aJin-back Park
■7001 ▼aSung-hyuck Kim
■7001 ▼aJai-sun Kyoung
■7001 ▼aSeung-wook Park
■7001 ▼aIlsin An
■7001 ▼aHye-keun Oh.
■773 ▼tJournal of The Korean Physical Society▼gVol. 49 No. 2 (2006. 8)▼d2006, 08
■URL ▼ahttp://www.kps.or.kr
■SIS ▼aS028785▼b60077342▼h8▼s2
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