서브메뉴
검색
The Influence of Transmission Reduction by Mask Haze Formation in ArF Lithography
The Influence of Transmission Reduction by Mask Haze Formation in ArF Lithography
Detailed Information
- Material Type
- 기사
- ISSN
- 03744884
- Author
- Sung-jin Kim.
- Title/Author
- The Influence of Transmission Reduction by Mask Haze Formation in ArF Lithography / Sung-jin Kim. ; Jung-hyuk Cho ; Jin-back Park ; Sung-hyuck Kim ; Jai-sun Kyoung ; Seung-wook Park ; Ilsin An ; Hye-keun Oh.
- Publish Info
- 서울 : 한국물리학회, 2006.
- Material Info
- pp. 518-523
- Index Term-Uncontrolled
- INFLUENCE TRANSMISSION REDUCTION MASK HAZE FORMATION ARF LITHOGRAPHY
- Added Entry-Personal Name
- Jung-hyuk Cho
- Added Entry-Personal Name
- Jin-back Park
- Added Entry-Personal Name
- Sung-hyuck Kim
- Added Entry-Personal Name
- Jai-sun Kyoung
- Added Entry-Personal Name
- Seung-wook Park
- Added Entry-Personal Name
- Ilsin An
- Added Entry-Personal Name
- Hye-keun Oh.
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60097757
MARC
008070418s2006 ULKa a ENG■022 ▼a03744884
■1001 ▼aSung-jin Kim.
■245 ▼aThe Influence of Transmission Reduction by Mask Haze Formation in ArF Lithography ▼dSung-jin Kim. ▼eJung-hyuk Cho▼eJin-back Park▼eSung-hyuck Kim▼eJai-sun Kyoung▼eSeung-wook Park▼eIlsin An▼eHye-keun Oh.
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 518-523
■653 ▼aINFLUENCE▼aTRANSMISSION▼aREDUCTION▼aMASK▼aHAZE▼aFORMATION▼aARF▼aLITHOGRAPHY
■7001 ▼aJung-hyuk Cho
■7001 ▼aJin-back Park
■7001 ▼aSung-hyuck Kim
■7001 ▼aJai-sun Kyoung
■7001 ▼aSeung-wook Park
■7001 ▼aIlsin An
■7001 ▼aHye-keun Oh.
■773 ▼tJournal of The Korean Physical Society▼gVol. 49 No. 2 (2006. 8)▼d2006, 08
■URL ▼ahttp://www.kps.or.kr
■SIS ▼aS028785▼b60077342▼h8▼s2
Preview
Export
ChatGPT Discussion
AI Recommended Related Books
Detail Info.
- Reservation
- Not Exist
- My Folder
- Reference Materials for Thesis Writing
- Reference Materials for Research Ethics
- Job-Related Books
