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Evaluation of Partial Coherent Imaging Using the Modulation Transfer Function in Immersion Lithography
Evaluation of Partial Coherent Imaging Using the Modulation Transfer Function in Immersion Lithography
Detailed Information
- Material Type
- 기사
- ISSN
- 03744884
- Author
- Mi-rim Jung.
- Title/Author
- Evaluation of Partial Coherent Imaging Using the Modulation Transfer Function in Immersion Lithography / Mi-rim Jung. ; Eun-a Kwak ; Ilsin An ; Hye-keun Oh ; Jai-soon Kim.
- Publish Info
- 서울 : 한국물리학회, 2006.
- Material Info
- pp. 246-252
- Index Term-Uncontrolled
- EVALUATION PARTIAL COHERENT IMAGING USING MODULATION TRANSFER FUNCTION IMMERSION LITHOGRAPHY
- Added Entry-Personal Name
- Eun-a Kwak
- Added Entry-Personal Name
- Ilsin An
- Added Entry-Personal Name
- Hye-keun Oh
- Added Entry-Personal Name
- Jai-soon Kim.
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60097469
MARC
008070417s2006 ULKa a ENG■022 ▼a03744884
■1001 ▼aMi-rim Jung.
■245 ▼aEvaluation of Partial Coherent Imaging Using the Modulation Transfer Function in Immersion Lithography ▼dMi-rim Jung. ▼eEun-a Kwak▼eIlsin An▼eHye-keun Oh▼eJai-soon Kim.
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 246-252
■653 ▼aEVALUATION▼aPARTIAL▼aCOHERENT▼aIMAGING▼aUSING▼aMODULATION▼aTRANSFER▼aFUNCTION▼aIMMERSION▼aLITHOGRAPHY
■7001 ▼aEun-a Kwak
■7001 ▼aIlsin An
■7001 ▼aHye-keun Oh
■7001 ▼aJai-soon Kim.
■773 ▼tJournal of The Korean Physical Society▼gVol. 49 No. 1 (2006. 7)▼d2006, 07
■URL ▼ahttp://www.kps.or.kr
■SIS ▼aS028404▼b60077342▼h8▼s2
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