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Residual Stress and Optical Properties in a Post-Annealed Ta₂O5/SiO₂ Multilayer Prepared by Using Dual-Ion-Beam Sputtering
Residual Stress and Optical Properties in a Post-Annealed Ta₂O5/SiO₂ Multilayer Prepared by Using Dual-Ion-Beam Sputtering
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- S. G. Yoon.
- 서명/저자
- Residual Stress and Optical Properties in a Post-Annealed Ta₂O5/SiO₂ Multilayer Prepared by Using Dual-Ion-Beam Sputtering / S. G. Yoon. , S. M. Kang , D. H. Yoon.
- 발행사항
- 서울 : 한국물리학회, 2006.
- 형태사항
- pp. 237-240
- 키워드
- RESIDUAL STRESS OPTICAL PROPERTIES POSTANNEALED TA₂O5SIO₂ MULTILAYER PREPARED USING DUALIONBEAM SPUTTERING
- 기타저자
- S. M. Kang
- 기타저자
- D. H. Yoon.
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60097467
MARC
008070417s2006 ULKa a ENG■022 ▼a03744884
■1001 ▼aS. G. Yoon.
■245 ▼aResidual Stress and Optical Properties in a Post-Annealed Ta₂O5/SiO₂ Multilayer Prepared by Using Dual-Ion-Beam Sputtering ▼dS. G. Yoon. ▼eS. M. Kang▼eD. H. Yoon.
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 237-240
■653 ▼aRESIDUAL▼aSTRESS▼aOPTICAL▼aPROPERTIES▼aPOSTANNEALED▼aTA₂O5SIO₂▼aMULTILAYER▼aPREPARED▼aUSING▼aDUALIONBEAM▼aSPUTTERING
■7001 ▼aS. M. Kang
■7001 ▼aD. H. Yoon.
■773 ▼tJournal of The Korean Physical Society▼gVol. 49 No. 1 (2006. 7)▼d2006, 07
■URL ▼ahttp://www.kps.or.kr
■SIS ▼aS028404▼b60077342▼h8▼s2
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