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Crystallinity Effect of AlN Thin Films on the Frequency Response of an AlN/IDT/Si Surface Acoustic Wave Device
Crystallinity Effect of AlN Thin Films on the Frequency Response of an AlN/IDT/Si Surface Acoustic Wave Device
Detailed Information
- Material Type
- 기사
- ISSN
- 03744884
- Author
- Soo Ho Kim.
- Title/Author
- Crystallinity Effect of AlN Thin Films on the Frequency Response of an AlN/IDT/Si Surface Acoustic Wave Device / Soo Ho Kim. ; Jae Hwan Ko ; Seung Hyun Ji ; Young Soo Yoon.
- Publish Info
- 서울 : 한국물리학회, 2006.
- Material Info
- pp. 199-202
- Index Term-Uncontrolled
- CRYSTALLINITY EFFECT ALN FILMS FREQUENCY RESPONSE ALNIDTSI SURFACE ACOUSTIC WAVE DEVICE
- Added Entry-Personal Name
- Jae Hwan Ko
- Added Entry-Personal Name
- Seung Hyun Ji
- Added Entry-Personal Name
- Young Soo Yoon.
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60097460
MARC
008070417s2006 ULKa a ENG■022 ▼a03744884
■1001 ▼aSoo Ho Kim.
■245 ▼aCrystallinity Effect of AlN Thin Films on the Frequency Response of an AlN/IDT/Si Surface Acoustic Wave Device ▼dSoo Ho Kim. ▼eJae Hwan Ko▼eSeung Hyun Ji▼eYoung Soo Yoon.
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 199-202
■653 ▼aCRYSTALLINITY▼aEFFECT▼aALN▼aFILMS▼aFREQUENCY▼aRESPONSE▼aALNIDTSI▼aSURFACE▼aACOUSTIC▼aWAVE▼aDEVICE
■7001 ▼aJae Hwan Ko
■7001 ▼aSeung Hyun Ji
■7001 ▼aYoung Soo Yoon.
■773 ▼tJournal of The Korean Physical Society▼gVol. 49 No. 1 (2006. 7)▼d2006, 07
■URL ▼ahttp://www.kps.or.kr
■SIS ▼aS028404▼b60077342▼h8▼s2
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