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Novel Model for Film Formation in Plasma Processing
Novel Model for Film Formation in Plasma Processing
Detailed Information
- Material Type
- 기사
- ISSN
- 03744884
- Author
- Leonid R. Shaginyan.
- Title/Author
- Novel Model for Film Formation in Plasma Processing / Leonid R. Shaginyan. ; J. G. Han ; N. V. Britun.
- Publish Info
- 서울 : 한국물리학회, 2006.
- Material Info
- pp. 1670-1674
- Added Entry-Personal Name
- J. G. Han
- Added Entry-Personal Name
- N. V. Britun.
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60097213
MARC
008070413s2006 ULKa a ENG■022 ▼a03744884
■1001 ▼aLeonid R. Shaginyan.
■245 ▼aNovel Model for Film Formation in Plasma Processing ▼dLeonid R. Shaginyan. ▼eJ. G. Han▼eN. V. Britun.
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 1670-1674
■653 ▼aNOVEL▼aMODEL▼aFILM▼aFORMATION▼aPLASMA▼aPROCESSING
■7001 ▼aJ. G. Han
■7001 ▼aN. V. Britun.
■773 ▼tJournal of The Korean Physical Society▼gVol. 48 No. 6 (2006. 6)▼d2006, 06
■URL ▼ahttp://www.kps.or.kr
■SIS ▼aS028403▼b60077342▼h8▼s2
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