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Simulator for the Design Considered Critical Dimension Bias in Resist Reflow Process
Simulator for the Design Considered Critical Dimension Bias in Resist Reflow Process
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Sang-kon Kim.
- 서명/저자
- Simulator for the Design Considered Critical Dimension Bias in Resist Reflow Process / Sang-kon Kim , Tae Seon Kim.
- 발행사항
- 서울 : 한국물리학회, 2006.
- 형태사항
- pp. 1661-1665
- 기타저자
- Tae Seon Kim.
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60097211
MARC
008070413s2006 ULKa a ENG■022 ▼a03744884
■1001 ▼aSang-kon Kim.
■245 ▼aSimulator for the Design Considered Critical Dimension Bias in Resist Reflow Process ▼dSang-kon Kim▼eTae Seon Kim.
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 1661-1665
■653 ▼aSIMULATOR▼aDESIGN▼aCONSIDERED▼aCRITICAL▼aDIMENSION▼aBIAS▼aRESIST▼aREFLOW▼aPROCESS
■7001 ▼aTae Seon Kim.
■773 ▼tJournal of The Korean Physical Society▼gVol. 48 No. 6 (2006. 6)▼d2006, 06
■URL ▼ahttp://www.kps.or.kr
■SIS ▼aS028403▼b60077342▼h8▼s2
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