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Chemical Mechanical Polishing Characteristics of Barium Titanate Thin Films Using Mixed Abrasive Slurry
Chemical Mechanical Polishing Characteristics of Barium Titanate Thin Films Using Mixed Abrasive Slurry
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Yong-jin Seo.
- 서명/저자
- Chemical Mechanical Polishing Characteristics of Barium Titanate Thin Films Using Mixed Abrasive Slurry / Yong-jin Seo , Woo-sun Lee.
- 발행사항
- 서울 : 한국물리학회, 2006.
- 형태사항
- pp. 1651-1656
- 기타저자
- Woo-sun Lee.
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60097209
MARC
008070413s2006 ULKa a ENG■022 ▼a03744884
■1001 ▼aYong-jin Seo.
■245 ▼aChemical Mechanical Polishing Characteristics of Barium Titanate Thin Films Using Mixed Abrasive Slurry ▼dYong-jin Seo▼eWoo-sun Lee.
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 1651-1656
■653 ▼aCHEMICAL▼aMECHANICAL▼aPOLISHING▼aCHARACTERISTICS▼aBARIUM▼aTITANATE▼aFILMS▼aUSING▼aMIXED▼aABRASIVE▼aSLURRY
■7001 ▼aWoo-sun Lee.
■773 ▼tJournal of The Korean Physical Society▼gVol. 48 No. 6 (2006. 6)▼d2006, 06
■URL ▼ahttp://www.kps.or.kr
■SIS ▼aS028403▼b60077342▼h8▼s2
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