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Interface Analysis of an AlGaAs Multilayer System by Using Spectroscopic Ellipsometry
Interface Analysis of an AlGaAs Multilayer System by Using Spectroscopic Ellipsometry
Detailed Information
- Material Type
- 기사
- ISSN
- 03744884
- Author
- T. H. Ghong.
- Title/Author
- Interface Analysis of an AlGaAs Multilayer System by Using Spectroscopic Ellipsometry / T. H. Ghong. ; Y. D. Kim ; D. E. Aspnes ; M. V. Klein ; D. S. Ko ; Y. W. Kim ; V. Elarde ; J. Coleman.
- Publish Info
- 서울 : 한국물리학회, 2006.
- Material Info
- pp. 1601-1605
- Index Term-Uncontrolled
- INTERFACE ANALYSIS ALGAAS MULTILAYER SYSTEM USING SPECTROSCOPIC ELLIPSOMETRY
- Added Entry-Personal Name
- Y. D. Kim
- Added Entry-Personal Name
- D. E. Aspnes
- Added Entry-Personal Name
- M. V. Klein
- Added Entry-Personal Name
- D. S. Ko
- Added Entry-Personal Name
- Y. W. Kim
- Added Entry-Personal Name
- V. Elarde
- Added Entry-Personal Name
- J. Coleman.
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60097196
MARC
008070413s2006 ULKa a ENG■022 ▼a03744884
■1001 ▼aT. H. Ghong.
■245 ▼aInterface Analysis of an AlGaAs Multilayer System by Using Spectroscopic Ellipsometry ▼dT. H. Ghong.▼eY. D. Kim▼eD. E. Aspnes▼eM. V. Klein▼eD. S. Ko▼eY. W. Kim▼eV. Elarde▼eJ. Coleman.
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 1601-1605
■653 ▼aINTERFACE▼aANALYSIS▼aALGAAS▼aMULTILAYER▼aSYSTEM▼aUSING▼aSPECTROSCOPIC▼aELLIPSOMETRY
■7001 ▼aY. D. Kim
■7001 ▼aD. E. Aspnes
■7001 ▼aM. V. Klein
■7001 ▼aD. S. Ko
■7001 ▼aY. W. Kim
■7001 ▼aV. Elarde
■7001 ▼aJ. Coleman.
■773 ▼tJournal of The Korean Physical Society▼gVol. 48 No. 6 (2006. 6)▼d2006, 06
■URL ▼ahttp://www.kps.or.kr
■SIS ▼aS028403▼b60077342▼h8▼s2
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