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Understanding the Behaviors of Cu During a Post-Gate-Oxidation Device Process by Using an Isotope Tracking Analysis
Understanding the Behaviors of Cu During a Post-Gate-Oxidation Device Process by Using an Isotope Tracking Analysis
상세정보
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Sung-wook Lee.
- 서명/저자
- Understanding the Behaviors of Cu During a Post-Gate-Oxidation Device Process by Using an Isotope Tracking Analysis / Sung-wook Lee , Young-hun Kim , Kwang-salk Kim , Byung-seop Hong , Bo-young Lee.
- 발행사항
- 서울 : 한국물리학회, 2006.
- 형태사항
- pp. 1548-1551
- 기타저자
- Young-hun Kim
- 기타저자
- Kwang-salk Kim
- 기타저자
- Byung-seop Hong
- 기타저자
- Bo-young Lee.
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60097177
MARC
008070412s2006 ULKa a ENG■022 ▼a03744884
■1001 ▼aSung-wook Lee.
■245 ▼aUnderstanding the Behaviors of Cu During a Post-Gate-Oxidation Device Process by Using an Isotope Tracking Analysis ▼dSung-wook Lee▼eYoung-hun Kim▼eKwang-salk Kim▼eByung-seop Hong▼eBo-young Lee.
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 1548-1551
■653 ▼aUNDERSTANDING▼aBEHAVIORS▼aCU▼aPOSTGATEOXIDATION▼aDEVICE▼aPROCESS▼aUSING▼aISOTOPE▼aTRACKING▼aANALYSIS
■7001 ▼aYoung-hun Kim
■7001 ▼aKwang-salk Kim
■7001 ▼aByung-seop Hong
■7001 ▼aBo-young Lee.
■773 ▼tJournal of The Korean Physical Society▼gVol. 48 No. 6 (2006. 6)▼d2006, 06
■URL ▼ahttp://www.kps.or.kr
■SIS ▼aS028403▼b60077342▼h8▼s2
