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Study on Crystallization of α-Si Measured by Imaging Spectroscopic Ellipsometry
Study on Crystallization of α-Si Measured by Imaging Spectroscopic Ellipsometry
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- A. J. Choi.
- 서명/저자
- Study on Crystallization of α-Si Measured by Imaging Spectroscopic Ellipsometry / A. J. Choi. , T. J. Kim , Y. D. Kim , J. H. Oh , J. Jang.
- 발행사항
- 서울 : 한국물리학회, 2006.
- 형태사항
- pp. 1544-1547
- 기타저자
- T. J. Kim
- 기타저자
- Y. D. Kim
- 기타저자
- J. H. Oh
- 기타저자
- J. Jang.
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60097176
MARC
008070412s2006 ULKa a ENG■022 ▼a03744884
■1001 ▼aA. J. Choi.
■245 ▼aStudy on Crystallization of α-Si Measured by Imaging Spectroscopic Ellipsometry ▼dA. J. Choi. ▼eT. J. Kim▼eY. D. Kim▼eJ. H. Oh▼eJ. Jang.
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 1544-1547
■653 ▼aSTUDY▼aCRYSTALLIZATION▼aMEASURED▼aIMAGING▼aSPECTROSCOPIC▼aELLIPSOMETRY
■7001 ▼aT. J. Kim
■7001 ▼aY. D. Kim
■7001 ▼aJ. H. Oh
■7001 ▼aJ. Jang.
■773 ▼tJournal of The Korean Physical Society▼gVol. 48 No. 6 (2006. 6)▼d2006, 06
■URL ▼ahttp://www.kps.or.kr
■SIS ▼aS028403▼b60077342▼h8▼s2
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