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Study on Crystallization of α-Si Measured by Imaging Spectroscopic Ellipsometry
Study on Crystallization of α-Si Measured by Imaging Spectroscopic Ellipsometry
Detailed Information
- Material Type
- 기사
- ISSN
- 03744884
- Author
- A. J. Choi.
- Title/Author
- Study on Crystallization of α-Si Measured by Imaging Spectroscopic Ellipsometry / A. J. Choi. ; T. J. Kim ; Y. D. Kim ; J. H. Oh ; J. Jang.
- Publish Info
- 서울 : 한국물리학회, 2006.
- Material Info
- pp. 1544-1547
- Index Term-Uncontrolled
- STUDY CRYSTALLIZATION MEASURED IMAGING SPECTROSCOPIC ELLIPSOMETRY
- Added Entry-Personal Name
- T. J. Kim
- Added Entry-Personal Name
- Y. D. Kim
- Added Entry-Personal Name
- J. H. Oh
- Added Entry-Personal Name
- J. Jang.
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60097176
MARC
008070412s2006 ULKa a ENG■022 ▼a03744884
■1001 ▼aA. J. Choi.
■245 ▼aStudy on Crystallization of α-Si Measured by Imaging Spectroscopic Ellipsometry ▼dA. J. Choi. ▼eT. J. Kim▼eY. D. Kim▼eJ. H. Oh▼eJ. Jang.
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 1544-1547
■653 ▼aSTUDY▼aCRYSTALLIZATION▼aMEASURED▼aIMAGING▼aSPECTROSCOPIC▼aELLIPSOMETRY
■7001 ▼aT. J. Kim
■7001 ▼aY. D. Kim
■7001 ▼aJ. H. Oh
■7001 ▼aJ. Jang.
■773 ▼tJournal of The Korean Physical Society▼gVol. 48 No. 6 (2006. 6)▼d2006, 06
■URL ▼ahttp://www.kps.or.kr
■SIS ▼aS028403▼b60077342▼h8▼s2
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