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Effects of Strain and Interface Roughness Between an AlN Buffer Layer and a ZnO Film Grown by Using Radio-Frequency Magnetron Sputtering
Effects of Strain and Interface Roughness Between an AlN Buffer Layer and a ZnO Film Grown by Using Radio-Frequency Magnetron Sputtering
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- M. S. Yi.
- 서명/저자
- Effects of Strain and Interface Roughness Between an AlN Buffer Layer and a ZnO Film Grown by Using Radio-Frequency Magnetron Sputtering / M. S. Yi , T. S. Cho , J. W. Jeung , S.W. Kim , J. M. Lee , J. Y. Oh , S. J. Park , D. Y. Noh.
- 발행사항
- 서울 : 한국물리학회, 2006.
- 형태사항
- pp. 1302-1306
- 키워드
- EFFECTS STRAIN INTERFACE ROUGHNESS ALN BUFFER LAYER ZNO FILM GROWN USING RADIOFREQUENCY MAGNETRON SPUTTERING
- 기타저자
- T. S. Cho
- 기타저자
- J. W. Jeung
- 기타저자
- S.W. Kim
- 기타저자
- J. M. Lee
- 기타저자
- J. Y. Oh
- 기타저자
- S. J. Park
- 기타저자
- D. Y. Noh.
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60096941
MARC
008070412s2006 ULKa a ENG■022 ▼a03744884
■1001 ▼aM. S. Yi.
■245 ▼aEffects of Strain and Interface Roughness Between an AlN Buffer Layer and a ZnO Film Grown by Using Radio-Frequency Magnetron Sputtering ▼dM. S. Yi▼eT. S. Cho▼eJ. W. Jeung▼eS.W. Kim▼eJ. M. Lee▼eJ. Y. Oh▼eS. J. Park▼eD. Y. Noh.
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 1302-1306
■653 ▼aEFFECTS▼aSTRAIN▼aINTERFACE▼aROUGHNESS▼aALN▼aBUFFER▼aLAYER▼aZNO▼aFILM▼aGROWN▼aUSING▼aRADIOFREQUENCY▼aMAGNETRON▼aSPUTTERING
■7001 ▼aT. S. Cho
■7001 ▼aJ. W. Jeung
■7001 ▼aS.W. Kim
■7001 ▼aJ. M. Lee
■7001 ▼aJ. Y. Oh
■7001 ▼aS. J. Park
■7001 ▼aD. Y. Noh.
■773 ▼tJournal of The Korean Physical Society▼gVol. 48 No. 6 (2006. 6)▼d2006, 06
■URL ▼ahttp://www.kps.or.kr
■SIS ▼aS028403▼b60077342▼h8▼s2
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