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Patterning of Thin Copper Films Under UV Exposure in Chlorine-Based Liquids
Patterning of Thin Copper Films Under UV Exposure in Chlorine-Based Liquids
Detailed Information
- Material Type
- 기사
- ISSN
- 03744884
- Author
- K. K. Chattopadhyay.
- Title/Author
- Patterning of Thin Copper Films Under UV Exposure in Chlorine-Based Liquids / K. K. Chattopadhyay ; Jongkyu Cho ; Jihoon Kwak ; Jaisun Kyoung ; Okkyung Kim ; Ilsin An.
- Publish Info
- 서울 : 한국물리학회, 2006.
- Material Info
- pp. 1273-1276
- Index Term-Uncontrolled
- PATTERNING COPPER FILMS UV EXPOSURE CHLORINEBASED LIQUIDS
- Added Entry-Personal Name
- Jongkyu Cho
- Added Entry-Personal Name
- Jihoon Kwak
- Added Entry-Personal Name
- Jaisun Kyoung
- Added Entry-Personal Name
- Okkyung Kim
- Added Entry-Personal Name
- Ilsin An.
- Control Number
- kjul:60096930
MARC
008070412s2006 ULKa a ENG■022 ▼a03744884
■1001 ▼aK. K. Chattopadhyay.
■245 ▼aPatterning of Thin Copper Films Under UV Exposure in Chlorine-Based Liquids ▼dK. K. Chattopadhyay▼eJongkyu Cho▼eJihoon Kwak▼eJaisun Kyoung▼eOkkyung Kim▼eIlsin An.
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 1273-1276
■653 ▼aPATTERNING▼aCOPPER▼aFILMS▼aUV▼aEXPOSURE▼aCHLORINEBASED▼aLIQUIDS
■7001 ▼aJongkyu Cho
■7001 ▼aJihoon Kwak
■7001 ▼aJaisun Kyoung
■7001 ▼aOkkyung Kim
■7001 ▼aIlsin An.
■773 ▼tJournal of The Korean Physical Society▼gVol. 48 No. 6 (2006. 6)▼d2006, 06
■■URL ▼ahttp://www.kps.or.kr
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