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Basic Study of the Electric Forces on a Glass Substrate in a Dry Etching System
Basic Study of the Electric Forces on a Glass Substrate in a Dry Etching System
상세정보
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Heehwan Choe.
- 서명/저자
- Basic Study of the Electric Forces on a Glass Substrate in a Dry Etching System / Heehwan Choe.
- 발행사항
- 서울 : 한국물리학회, 2006.
- 형태사항
- pp. 982-984
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60096814
MARC
008070409s2006 ULKa a ENG■022 ▼a03744884
■1001 ▼aHeehwan Choe.
■245 ▼aBasic Study of the Electric Forces on a Glass Substrate in a Dry Etching System▼dHeehwan Choe.
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 982-984
■653 ▼aBASIC▼aSTUDY▼aELECTRIC▼aFORCES▼aGLASS▼aSUBSTRATE▼aDRY▼aETCHING▼aSYSTEM
■773 ▼tJournal of The Korean Physical Society▼gVol. 48 No. 5 (2006. 5)▼d2006, 05
■URL ▼ahttp://www.kps.or.kr
■SIS ▼aS028402▼b60077342▼h8▼s2
