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Nanoscale Lines Patterned by 1 : 1 Electron-Beam Projection Lithography Using an Electron Emission Mask
Nanoscale Lines Patterned by 1 : 1 Electron-Beam Projection Lithography Using an Electron Emission Mask
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Kwang Nam Choi.
- 서명/저자
- Nanoscale Lines Patterned by 1 : 1 Electron-Beam Projection Lithography Using an Electron Emission Mask / Kwang Nam Choi. , Kwan Soo Chung , D. -W. Kim , In. K. Yoo.
- 발행사항
- 서울 : 한국물리학회, 2006.
- 형태사항
- pp. 964-967
- 기타저자
- Kwan Soo Chung
- 기타저자
- D. -W. Kim
- 기타저자
- In. K. Yoo.
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60096810
MARC
008070409s2006 ULKa a ENG■022 ▼a03744884
■1001 ▼aKwang Nam Choi.
■245 ▼aNanoscale Lines Patterned by 1 : 1 Electron-Beam Projection Lithography Using an Electron Emission Mask▼dKwang Nam Choi.▼eKwan Soo Chung▼eD. -W. Kim▼eIn. K. Yoo.
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 964-967
■653 ▼aNANOSCALE▼aLINES▼aPATTERNED▼a1▼aELECTRONBEAM▼aPROJECTION▼aLITHOGRAPHY▼aUSING▼aELECTRON▼aEMISSION▼aMASK
■7001 ▼aKwan Soo Chung
■7001 ▼aD. -W. Kim
■7001 ▼aIn. K. Yoo.
■773 ▼tJournal of The Korean Physical Society▼gVol. 48 No. 5 (2006. 5)▼d2006, 05
■URL ▼ahttp://www.kps.or.kr
■SIS ▼aS028402▼b60077342▼h8▼s2
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