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Fabrication of On-Chip Nanofluidic Channels by Using Sacrificial Photoresist Templated SiO₂ Sputter Deposition
Fabrication of On-Chip Nanofluidic Channels by Using Sacrificial Photoresist Templated SiO₂ Sputter Deposition
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Sung-min Kang.
- 서명/저자
- Fabrication of On-Chip Nanofluidic Channels by Using Sacrificial Photoresist Templated SiO₂ Sputter Deposition / Sung-min Kang , Bonghyun Park , Il-sik Nam , hae-hyun Lim , Heongkyu Ju , Seung-beck Lee.
- 발행사항
- 서울 : 한국물리학회, 2006.
- 형태사항
- pp. 883-887
- 키워드
- FABRICATION ONCHIP NANOFLUIDIC CHANNELS USING SACRIFICIAL PHOTORESIST TEMPLATED SIO₂ SPUTTER DEPOSITION
- 기타저자
- Bonghyun Park
- 기타저자
- Il-sik Nam
- 기타저자
- hae-hyun Lim
- 기타저자
- Heongkyu Ju
- 기타저자
- Seung-beck Lee.
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60096795
MARC
008070409s2006 ULKa a ENG■022 ▼a03744884
■1001 ▼aSung-min Kang.
■245 ▼aFabrication of On-Chip Nanofluidic Channels by Using Sacrificial Photoresist Templated SiO₂ Sputter Deposition▼dSung-min Kang▼eBonghyun Park▼eIl-sik Nam▼ehae-hyun Lim▼eHeongkyu Ju▼eSeung-beck Lee.
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 883-887
■653 ▼aFABRICATION▼aONCHIP▼aNANOFLUIDIC▼aCHANNELS▼aUSING▼aSACRIFICIAL▼aPHOTORESIST▼aTEMPLATED▼aSIO₂▼aSPUTTER▼aDEPOSITION
■7001 ▼aBonghyun Park
■7001 ▼aIl-sik Nam
■7001 ▼ahae-hyun Lim
■7001 ▼aHeongkyu Ju
■7001 ▼aSeung-beck Lee.
■773 ▼tJournal of The Korean Physical Society▼gVol. 48 No. 5 (2006. 5)▼d2006, 05
■URL ▼ahttp://www.kps.or.kr
■SIS ▼aS028402▼b60077342▼h8▼s2
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