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Plasma and Electrical Characteristics of a Novel Internal Linear Inductively Coupled Plasma Source for Flat Panel Display Applications
Plasma and Electrical Characteristics of a Novel Internal Linear Inductively Coupled Plasma Source for Flat Panel Display Applications
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Kim, Kyong Nam
- 서명/저자
- Plasma and Electrical Characteristics of a Novel Internal Linear Inductively Coupled Plasma Source for Flat Panel Display Applications / Kyong Nam Kim 저 , Geun Young Yeom 공저
- 발행사항
- 서울 : 한국물리학회, 2006.
- 형태사항
- pp. 422-426
- 키워드
- PLASMA ELECTRICAL CHARACTERISTICS NOVEL INTERNAL LINEAR INDUCTIVELY COUPLED SOURCE FLAT PANEL DISPLAY APPLICATIONS
- 기타저자
- Yeom, Geun Young
- Control Number
- kjul:60096616
MARC
008070405s2006 ULKa a ENG■022 ▼a03744884
■1001 ▼aKim, Kyong Nam
■245 ▼aPlasma and Electrical Characteristics of a Novel Internal Linear Inductively Coupled Plasma Source for Flat Panel Display Applications▼dKyong Nam Kim 저▼eGeun Young Yeom 공저
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 422-426
■653 ▼aPLASMA▼aELECTRICAL▼aCHARACTERISTICS▼aNOVEL▼aINTERNAL▼aLINEAR▼aINDUCTIVELY▼aCOUPLED▼aSOURCE▼aFLAT▼aPANEL▼aDISPLAY▼aAPPLICATIONS
■7001 ▼aYeom, Geun Young
■773 ▼tJournal of The Korean Physical Society▼gVol. 48 No. 3 (2006. 3)▼d2006, 03
■■URL ▼ahttp://www.kps.or.kr
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