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Fabrication and Properties of an Epitaxial AIN Film on a SiC Substrate by Using Reactive RF Magnetron Sputtering
Fabrication and Properties of an Epitaxial AIN Film on a SiC Substrate by Using Reactive RF Magnetron Sputtering
Detailed Information
- Material Type
- 기사
- ISSN
- 03744884
- Author
- Kim, Kwang-ho
- Title/Author
- Fabrication and Properties of an Epitaxial AIN Film on a SiC Substrate by Using Reactive RF Magnetron Sputtering / Kwang-ho Kim 저 ; Yong-seong Kim ; Sang-hyun Jeong ; Soon-won Jung ; Soo Hong Lee 공저
- Publish Info
- 서울 : 한국물리학회, 2006.
- Material Info
- pp. 275-278
- Index Term-Uncontrolled
- FABRICATION PROPERTIES EPITAXIAL FILM SIC SUBSTRATE USING REACTIVE RF MAGNETRON SPUTTERING
- Added Entry-Personal Name
- Kim, Yong-seong
- Added Entry-Personal Name
- Jeong, Sang-hyun
- Added Entry-Personal Name
- Jung, Soon-won
- Added Entry-Personal Name
- Lee, Soo Hong
- Control Number
- kjul:60096578
MARC
008070405s2006 ULKa a ENG■022 ▼a03744884
■1001 ▼aKim, Kwang-ho
■245 ▼aFabrication and Properties of an Epitaxial AIN Film on a SiC Substrate by Using Reactive RF Magnetron Sputtering▼dKwang-ho Kim 저▼eYong-seong Kim▼eSang-hyun Jeong▼eSoon-won Jung▼eSoo Hong Lee 공저
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 275-278
■653 ▼aFABRICATION▼aPROPERTIES▼aEPITAXIAL▼aFILM▼aSIC▼aSUBSTRATE▼aUSING▼aREACTIVE▼aRF▼aMAGNETRON▼aSPUTTERING
■7001 ▼aKim, Yong-seong
■7001 ▼aJeong, Sang-hyun
■7001 ▼aJung, Soon-won
■7001 ▼aLee, Soo Hong
■773 ▼tJournal of The Korean Physical Society▼gVol. 48 No. 2 (2006. 2)▼d2006, 02
■■URL ▼ahttp://www.kps.or.kr
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